THIN FILM TRANSISTOR, DISPLAY DEVICE HAVING THIN FILM TRANSISTOR, AND METHOD FOR MANUFACTURING THE SAME

摘要

A thin film transistor, a display device having a thin film transistor is provided to manufacture a thin film transistor having a high electrical property by using non-crystalline thin film as a channel. A buffer layer(73) is formed on a non crystalline, and a pair of semiconductor films(72) having impurity element is formed on the buffer. Wirings(71a~71c) are formed on the pair of the semiconductor film, and the thickness of the non-crystalline having a donor is between 1nm and 50nm. non-crystalline semiconductor film is non-crystalline containing a silicon film or germanium. The donor is made of phosphorus, arsenic, antimony.