| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and inexpensive pressure sensor for measuring relative pressure excellent in resistance to environments. SOLUTION: The pressure sensor 1 for measuring the relative pressure includes a silicon substrate 3 having a diaphragm 2, a pressure detecting circuit 4 for detecting the pressure applied to the diaphragm 2, a multilayer substrate 6 oppositely provided on a surface of the diaphragm 2 on the side of a first principal surface of the silicon substrate 3 and having a reference gas inlet hole 5 for leading a reference gas to the surface of the diaphragm 2, a joining member 17b for joining a first principal surface periphery of the silicon substrate 3 with a first principal surface periphery of the multilayer substrate 6, a signal processing circuit provided on the first principal surface of the silicon substrate 3 between joining regions of the surface of the diaphragm 2 and the joining member 17b for amplifying and outputting a detection signal of the pressure detecting circuit 4, a conductive member 7 for transmitting the output signal of the signal processing circuit to electric wires 13a, 14 and 13b passing through the multilayer substrate 6, and a mounting pad 15 provided on the side of a second principal surface of the multilayer substrate 6 for transmitting the output signal transmitted to the electric wire 13b to an external substrate. COPYRIGHT: (C)2009,JPO&INPIT
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