SUBSTRATE HOLDING MECHANISM, SUBSTRATE DELIVERY/RECEPTION MECHANISM, AND SUBSTRATE PROCESSING DEVICE

摘要

A substrate holding mechanism capable of reliably performing delivery and reception of a substrate. The substrate holding mechanism has a substrate holding section for holding a rectangular substrate (W), substrate holding rollers (120) arranged at those positions on the substrate holding section which correspond to two facing sides of the substrate (W) and rotatably supported by the substrate holding section, and roller drive means for rotationally driving the substrate holding rollers (120). Each substrate holding roller (120) has a circular tube section (121) and holding flanges (123a, b) each located at a portion of the outer periphery of each of opposite end surfaces of the circular tube section (121). When the substrate holding rollers (120) are rotated by the roller drive means, holding of edges of the substrate (W) by and release of the holding by the substrate holding flanges (123a, b) can be switched between each other according to the angle of the rotation of the substrate holding rollers (120).