INTRACELLULAR DEVICE WHICH CAN BE USED AS A BIOLOGICAL ACTIVITY SENSOR ELEMENT OR ACTUATOR

摘要

The invention relates to an intracellular device which can be used as a biological activity sensor element or actuator, formed by or based on silicon (monocrystalline silicon with crystallographic orientation (100), polysilicon or silicon oxide), having lateral physical dimensions of between 50 nanometres and 5 micrometres and a thickness of between 20 nanometres and 2 micrometres. The surface(s) of the device can be functionalised by coating same with chemical compounds, fluorescent molecules, proteins, antibodies, receptors, therapeutic agents, cell death protectors and, in general, any substance having biological activity which enables the biological functionalisation of same. The production of the device is based on current microelectronic techniques.