| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inspection device capable of miniaturizing a light source and omitting a conventionally required device for obtaining an incoherent state. <P>SOLUTION: The inspection device 100 as one embodiment of the present invention is equipped with a light source 140 having a plurality of surface emission laser elements 146 for respectively emitting fundamental waves, an illumination optical system 170 for irradiating a photomask 101 with the plurality of fundamental waves emitted from a plurality of the surface emission laser elements 146 and an XYθtable 102 on which the photomask 101 is placed. By this inventive one embodiment, the light source can be miniaturized and the conventionally required device for obtaining the incoherent state can be omitted. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
