| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an arc tube capable of aiming at energy saving, even in the case of forming of an optical thin film on an outer surface of a tube part by the thermal CVD method. SOLUTION: The manufacturing method of the arc tube includes an arc tube preparing process of preparing an arc tube 20 equipped with a tube part 30 incorporating a pair of electrodes 42, 52 and a pair of sealing parts 40, 50 extended to either side of the tube part 30, and an optical thin film forming process of forming an anti-reflection film 60 as an optical thin film on an outer surface of the tube part 30 by the thermal CVD method, in that order. In the optical thin film forming process, the tube part 30 is to be heated up to a given temperature by flowing current in the arc tube 20. COPYRIGHT: (C)2009,JPO&INPIT
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