| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface defect inspection method which enables accurate detection of surface defects in information recording media which can cause errors, and to provide a surface defect inspection apparatus. SOLUTION: A differential interference microscope 3 and a CCD camera 4 of the surface defect inspection apparatus 1 image the surface of an information recording medium to be inspected M for acquiring differential interference images. An image processing device 5 sets a defect candidate slice level, based on an image example of a reference sample including defects with respect to the differential interference images and selects defect candidates from among the differential interference images. Defect candidates having an area equal to or larger than a defect area determined values, based on the area of a defect having a minimum error size, are extracted from the defect candidates as actual defects selected corresponding to errors. COPYRIGHT: (C)2009,JPO&INPIT
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