| 摘要 |
PROBLEM TO BE SOLVED: To provide an illumination optical device capable of attaining high-efficiency and a substantially uniform illumination area regardless of height of an observation surface (position in an optical axis direction). SOLUTION: The illumination optical device 10 has a light source 11, an optical system 12 having positive refractive power, and an afocal optical system 13 having no refractive power. The optical system 12 and the afocal optical system 13 function as a condenser lens (12 and 13) together. Luminous flux from the light source 11 is guided to a light irradiation surface 10A through the condenser lens (12 and 13). The condenser lens (12 and 13) are arranged between the light source 11 and the light irradiation surface 10A so as to telecentrically illuminate the light irradiation surface 10A. Namely, the light source 11 is arranged on the front-side focal plane of the condenser lens (12 and 13), and the rear-side focal plane thereof is set as the light irradiation surface 10A. The afocal optical system 13 is a movable part (adjusting group) when adjusting the illumination area (light irradiation surface 10A) in the optical axis direction. COPYRIGHT: (C)2009,JPO&INPIT
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