DEVICE FOR MEASURING LASER BEAM STABILIZING CHARACTERISTIC

摘要

PROBLEM TO BE SOLVED: To measure a stabilizing time or the like until a beam shape stabilizes from the rise of a laser light source. SOLUTION: A device for measuring laser beam stabilizing characteristics includes: a light receiving sensor (1) for detecting change of light receiving shape; a data acquisition part (2) for acquiring data of change of the light receiving shape detected with the light receiving sensor (1); an analyzing part (3) for obtaining the stabilizing time and a beam diameter after stabilization until the beam shape stabilizes from the rise of the laser light source (L) based on obtained data; and a stabilizing confirmation signal output part (4) for outputting a stabilizing confirmation signal (C) when the stabilizing confirmation signal (C) is output after obtaining the stabilizing time and the beam diameter after stabilization or the beam diameter is in an allowable range from the beam diameter after stabilization after stabilizing time passage after the rise of the laser light source (L). After the stabilizing confirmation signal (C) is output, a laser beam (B) can be properly used if the laser beam (B) is put to practical use. COPYRIGHT: (C)2009,JPO&INPIT