| 摘要 |
PROBLEM TO BE SOLVED: To certainly suck an object to be sucked 10 without increasing a suction force of a vacuum pump 4 even when sucking the object 10 having a small area, in a suction device 1 sucking the object 10 such as a printed-wiring board. SOLUTION: Electromagnets 5 controlling the positions of spherical valves 13 closing suction holes are provided in the suction holes. After starting suction by suction means, the electromagnets 5 are sequentially driven from the electromagnet 5 positioned near to a discharge opening 20 to shield channels for the suction holes. The suction holes with no object 10 placed therein are thereby certainly closed. COPYRIGHT: (C)2009,JPO&INPIT
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