PURIFYING DEVICE FOR COMPOUNDS IN LIQUID-PHASE STATE

摘要

PROBLEM TO BE SOLVED: To provide an effective method and device for removing metal impurities from corrosive liquefied gases when the corrosive liquefied gas is filled into a final container. SOLUTION: A method for removing metal impurities from corrosive liquefied gases is characterized in transferring the liquefied gas in a vapor-phase state when the corrosive liquefied gas is filled from a source container 102 to a receiving container 104. This method can reduce metal concentrations by several thousands of ppb units and can reduce the metal impurities from the liquefied gases after recondensation. The vapor transfer is accomplished by controlled differential pressure rather than mechanical pumping, thereby generating no particle or impurities. COPYRIGHT: (C)2009,JPO&INPIT