| 发明名称 |
GRAY-TONE LITHOGRAPHY USING OPTICAL DIFFUSERS |
| 摘要 |
A method of: directing an exposing light through an optical diffuser; directing the diffused light though a photomask having transparent areas corresponding to a gray-tone pattern; directing the masked light onto a photoresist material on a substrate; developing the photoresist to produce a three dimensional structure in the photoresist.
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| 申请公布号 |
US2009092934(A1) |
申请公布日期 |
2009.04.09 |
| 申请号 |
US20080195594 |
申请日期 |
2008.08.21 |
| 申请人 |
THE GOVT. OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE NAVY |
发明人 |
CHRISTOPHERSEN MARC;PHLIPS BERNARD |
| 分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
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