| 摘要 |
The invention relates to a device (100) for deflecting a particle beam (2) out of a beam axis (8), or for guiding a particle beam (2) into the beam axis (8). Furthermore, the invention relates to a particle beam unit (100) having a device of this type. It is the object of the invention to specify a device for a particle beam unit of this type, which has a simple design, requires little space, and additionally ensures that no area of an object (3) that is not to be struck is struck by a particle beam (2). According to the invention, a configuration having the following sequence along the beam axis (8) is selected: first deflection element (11a, 11b) - a magnetic apparatus (12) for providing a magnetic field (B) axially to the beam axis (8) - a second deflection element (16a, 16b). |
