发明名称 RADIATION-SENSITIVE RESIN COMPOSITION, SPACER AND PROTECTIVE FILM OF LIQUID CRYSTAL DISPLAY DEVICE, AND METHOD FOR FORMING THOSE
摘要 <P>PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition obtaining an adequate residual film ratio even under &le;1,000 J/m<SP>2</SP>of exposure energy, and capable of forming a spacer or a protective film for a display device excellent in adhesion and rubbing resistance and further having a high elastic recovery rate even at a post-bake temperature of <200&deg;C. <P>SOLUTION: The radiation-sensitive resin composition comprises [A] a copolymer of (a1) at least one selected from the group consisting of unsaturated carboxylic acids and unsaturated carboxylic acid anhydrides and (a2) an unsaturated compound other than the component (a1), [B] a polymerizable compound having an ethylenically unsaturated bond, [C] a radiation-sensitive radical generator, and [D] a specific onium-fluorinated alkylfluorophosphate. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009075284(A) 申请公布日期 2009.04.09
申请号 JP20070243287 申请日期 2007.09.20
申请人 JSR CORP 发明人 ICHINOHE DAIGO;KAJITA TORU
分类号 G03F7/029;G02F1/1339;G03F7/032;G03F7/40 主分类号 G03F7/029
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