Endpoint detection device for realizing real-time control of a plasma reactor and the plasma reactor comprising the endpoint detection device and the endpoint detection method,申请号KR20070073864-传众专利搜索

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发明名称	Endpoint detection device for realizing real-time control of a plasma reactor and the plasma reactor comprising the endpoint detection device and the endpoint detection method
摘要
申请公布号	KR100892248(B1)	申请公布日期	2009.04.09
申请号	KR20070073864	申请日期	2007.07.24
申请人		发明人
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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