发明名称 VAPOR DEPOSITION MASK AND METHOD FOR PRODUCING VAPOR DEPOSITION MASK
摘要 PROBLEM TO BE SOLVED: To provide a vapor deposition mask with which a vapor deposition material can be deposited at high efficiency of utilizing the material. SOLUTION: The vapor deposition mask 20 is provided with a metallic sheet 34 which has a first face 34a and a second face 34b on the side opposite from the first face, and which is formed with through holes 25 elongating in the space between the first face and the second face. Linearly elongating grooves 26 are formed on the first face side in the metallic sheet. Holes 27 are formed on the second face side in the metallic sheet. The grooves and the holes are communicated, thereby the through holes passing through the metallic sheet are formed by the grooves and the holes. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009074160(A) 申请公布日期 2009.04.09
申请号 JP20080081349 申请日期 2008.03.26
申请人 DAINIPPON PRINTING CO LTD 发明人 OGAWA KAZUYA
分类号 C23C14/24;H01L51/50;H05B33/10 主分类号 C23C14/24
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