| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic force sensor performing six-shaft detection of forces and moments, by enhancing sensitivity, inhibiting impact on exterior exerted from a magnetic flux generating source, and structuralizing to improve reliability against noises. SOLUTION: A magnetic substance is deployed to control the flow of magnetic flux to the outer circumference of a magnetic flux generating source. Thereby, the magnetic flux is concentrated to flow into a magnetoelectric conversion element, thus resulting in high sensitivity. Since the magnetic flux enters preferentially into the magnetic substance of high permeability, the impact on exterior exerted from the magnetic flux generating source is inhibited to enhance reliability against noises. Moreover, by deploying eight magnetoelectric conversion element centering on the magnetic flux generation source, six-shaft detection is possible of forces and moments. COPYRIGHT: (C)2009,JPO&INPIT |
