摘要 |
PROBLEM TO BE SOLVED: To provide a magnetron in which, while maintaining a heat resistance and a vacuum holding performance inside a magnetron, choosing options of end hat materials are increased. SOLUTION: A pair of end hats 6, 7 fixed on both ends of a cathode 5 of the magnetron which is provided with an anode cylinder 1 extending along a central axis 41 in a cylindrical shape, a plurality of vanes 2 extending toward the central axis 41 from inside the anode cylinder 1, and the cathode 5 of a spiral shape arranged on the central axis, are made of a niobium containing metal, such as a niobium simple substance, a Nb-Sn alloy, a Nb-Ti alloy, a Nb-Ni alloy or the like. On a surface of the end hats 6, 7, a gas absorbing metal such as Ta, Zr, Ti or the like may be deposited. COPYRIGHT: (C)2009,JPO&INPIT
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