发明名称 |
LASER DIODE HAVING NANO PATTERNS AND METHOD OF FABRICATING THE SAME |
摘要 |
A laser diode having nano patterns is disposed on a substrate. A first conductive-type clad layer is disposed on the substrate, and a second conductive-type clad layer is disposed on the first conductive-type clad layer. An active layer is interposed between the first conductive-type clad layer and the second conductive-type clad layer. Column-shaped nano patterns are arranged at a surface of the second conductive-type clad layer to form a laser diode such as a distributed feedback laser diode.
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申请公布号 |
US2009092165(A1) |
申请公布日期 |
2009.04.09 |
申请号 |
US20080185995 |
申请日期 |
2008.08.05 |
申请人 |
SEOUL OPTO DEVICE CO., LTD.;THE UNIVERSITY OF TOKUSHIMA |
发明人 |
SAKAI SHIRO |
分类号 |
H01S5/12;H01L21/02 |
主分类号 |
H01S5/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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