RADIATION-SENSITIVE COMPOSITION

摘要

Disclosed is a radiation-sensitive composition containing a first polymer (A) which contains no fluorine atom and becomes alkali-soluble by the action of an acid, a second polymer (B) having a repeating unit (b1) represented by the general formula (1) below and a repeating unit (b2) containing a fluorine atom, and a radiation-sensitive acid generator (C). This radiation-sensitive composition contains 0.1-20 parts by mass of the second polymer (B) per 100 parts by mass of the first polymer (A), and enables to form a resist film which can effectively suppress generation of water mark defects or bubble defects which are caused by liquid immersion exposure. (In the general formula (1), R1 represents a methyl group or the like, and R2 represents a linear or branched alkyl group having 1-12 carbon atoms or the like.)