发明名称 |
IMPROVED SILICON CARBIDE PARTICLES, METHODS OF FABRICATION, AND METHODS USING SAME |
摘要 |
<p>Improved silicon carbide particles, improved silicon carbide abrasive particles, and abrasive slurry compositions for use chemical mechanical planarization (CMP) processes, the particles can comprise nano-sized carbide particles, particularly silicon carbide particles having a surface chemistry similar to silica.</p> |
申请公布号 |
WO2009046293(A1) |
申请公布日期 |
2009.04.09 |
申请号 |
WO2008US78741 |
申请日期 |
2008.10.03 |
申请人 |
SAINT-GOBAIN CERAMICS & PLASTICS, INC.;BAKSHI, ABHAYA K.;CHERIAN, ISAAC K. |
发明人 |
BAKSHI, ABHAYA K.;CHERIAN, ISAAC K. |
分类号 |
C09K3/14;C04B41/50 |
主分类号 |
C09K3/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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