发明名称 Varactores including interconnect layers
摘要 In an embodiment of the present invention is provided a varactor comprising a substrate, a plurality of bottom electrodes positioned on a surface of the substrate separated to form a gap therein, a tunable dielectric material positioned on the surface of the substrate and within the gap, the tunable dielectric at least partially overlaying the plurality of electrodes, and a top electrode in contact with the tunable dielectric.
申请公布号 US2009091000(A1) 申请公布日期 2009.04.09
申请号 US20080313491 申请日期 2008.11.20
申请人 发明人 ZHANG XUBAI;SENGUPTA LOUISE C.;SUN JASON;DUTOIT NICOLASS
分类号 H01L29/93 主分类号 H01L29/93
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