DRYING DEVICE FOR COATING FILM

摘要

By disposing a substrate (4) whose upper surface is coated with a coating liquid in a drying area for drying by heating by a heating means (hot plate) (3) and relatively moving two supporting means (5, 6) for supporting the substrate by driving means (7), switching between a mode in which one supporting means (5) supports the lower surface of the substrate (4) at points and a mode in which the other supporting means (6) supports the surface of the substrate (4) at points different from those of the one supporting means (5) is performed. The driving means (7) are arranged in regions (S) outside the edge of the drying area (2) in plan view.