发明名称 SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device improved in reliability by restraining influence of a crack occurring due to probe inspection without reducing the number of electrode pads arrangeable per unit area. <P>SOLUTION: A probe region 32 allowing probe contact and a non-probe region 31 are formed in an electrode pad 21. In two or more lines of the electrode pads 21 arranged in a zigzag form, extraction wires 52 connecting the different electrode pads 21 to an internal circuit are arranged immediately below the non-probe regions 31 without arranging them immediately below the probe regions 32. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009076808(A) 申请公布日期 2009.04.09
申请号 JP20070246576 申请日期 2007.09.25
申请人 PANASONIC CORP 发明人 TAKAHASHI MASAO;TAKEMURA YASUSHI;SAKASHITA TOSHIHIKO;MIMURA TADAAKI
分类号 H01L21/60 主分类号 H01L21/60
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