DEPOSITION HOLDER AND DEPOSITION APPARATUS OF SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide the deposition holder of a semiconductor device that definitely prevents a deposition element from wrapping around the opposite deposition source end of a semiconductor device. SOLUTION: The holder includes a holder body that allows a deposited surface of the semiconductor device to be exposed and supports the semiconductor device and a shield 17 that shields a gap formed between the semiconductor device and the holder body from the deposited surface side of the semiconductor device while the deposited surface of the semiconductor device is exposed. This allows the deposition element 16 moving forward the gap from the deposition source 3 to be blocked by the shield 17. COPYRIGHT: (C)2009,JPO&INPIT