发明名称 MOUNTING DEVICE FOR ELECTRONIC COMPONENT
摘要 PROBLEM TO BE SOLVED: To provide a mounting device for an electronic component that can prevent an electronic component subjected to bonding from being heated unnecessarily. SOLUTION: The mounting device for an electronic component is used for bonding the electronic component A onto a heated base B and includes a heating member 6 which comes in contact with the lower surface of the base B where the electronic component A is to be bonded and which partially heats the base B and a cooling means 7 of cooling a periphery of the part of the base B heated by the heating member 6. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009076595(A) 申请公布日期 2009.04.09
申请号 JP20070242760 申请日期 2007.09.19
申请人 CANON MACHINERY INC 发明人 TAKASU SEIICHI;NAGASAWA TORU
分类号 H01L21/52 主分类号 H01L21/52
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