| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo-molecular pump capable of more accurately estimating rotor temperature. SOLUTION: In the turbo-molecular pump, a correlation between the temperature of a rotor 2 and average electric current of a motor 6 is stored in a storage part 35 beforehand. A calculation part 31 calculates average electric current of the motor 6, and estimates the temperature of the rotor 2 based on the calculated motor average current and the correlation. A plurality of correlations between different fixed factors (set temperature of the turbo-molecular pump, set temperature of a pressure regulating valve, gas types) are stored in the storage part 35, and the correlation corresponding to the fixed factor input and set by a setting part 36 is used. COPYRIGHT: (C)2009,JPO&INPIT
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