| 摘要 |
PROBLEM TO BE SOLVED: To provide a floating method and a floating unit for floating a workpiece without generating a warp in the workpiece. SOLUTION: This floating unit comprises a chamber 36. A ceiling wall of the chamber 36 is formed with ventilation holes communicated with an air-tight space inside of the chamber. The floating unit also comprises a porous plate fixed to the ceiling wall on a lower side thereof and formed with a conveyance path surface F. Gas is supplied to the air-tight space, and injected from the conveyance path side through air spaces of the ventilation holes and the porous plate. Further, the floating unit is arranged over the conveyance path F, and comprises a non-contact holder 170 for holding a film P as a workpiece without a contact. The non-contact holder 170 generates the negative pressure in a central part of a lower part of the holder with the Bernoulli's principle by injecting air toward the outside of the holder from a gap between the film P over the whole periphery of the lower part of the holder. COPYRIGHT: (C)2009,JPO&INPIT
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