| 摘要 |
A semiconductor apparatus includes: a semiconductor layer of a first conductivity type; a first main electrode provided on a frontside of the semiconductor layer; a second main electrode provided on a backside of the semiconductor layer, the backside being opposite to the frontside; a plurality of semiconductor regions of a second conductivity type provided in a surface portion of the semiconductor layer in a edge termination region outside a device region in which a main current path is formed in a vertical direction between the first main electrode and the second main electrode; and a plurality of buried semiconductor regions of the second conductivity type provided in the semiconductor layer in the edge termination region, spaced from the semiconductor regions, and spaced from each other. The buried semiconductor regions provided substantially at the same depth from the frontside of the semiconductor layer are numbered as first, second, . . . , n-th, sequentially from the one nearer to the device region, the n-th buried semiconductor regions provided at different depths from the frontside of the semiconductor layer are displaced toward the device region relative to the corresponding n-th semiconductor region, and the buried semiconductor region located deeper from the frontside of the semiconductor layer is displaced more greatly toward the device region.
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