| 摘要 |
To provide a processing system for a process object capable of preventing a transport arm mechanism from being thermally damaged, so as to effectively perform a transport operation of the process object. A processing system 2, which takes out a process object W from a storage box 6 for process object, and thermally process the process object, includes: a vertical processing unit 24; a process-object transport area 10 disposed below the processing unit; a plurality of process-object boats 20 configured to hold the process objects; a boat elevating means 68 configured to vertically move the process-object boat 20; a boat table for transport 52, on which the process-object boat can be placed; and a transport arm mechanism configured to transport the process objects between the storage box 6 and the process-object boat 20 placed on the boat table for transport 52. The transport arm mechanism 56 is vertically moved by an arm elevating means 58. A temperature measuring means 86 is disposed in an upper part in the process-object transport area. The transport arm mechanism 58 and the arm elevating means 58 are controlled by a transport control part 88 based on a measured value of the temperature measuring means 86, so that a transport operation of the transport arm mechanism is controlled.
|
