Luftlager und Verfahren zur Einstellung eines Lagerspalts

摘要

The air bearing has a pressure sensor (15) mounted in the air feed line (11). The air outlets surround a chamber (12) which faces the bearing surface (8) and is connected to a vacuum pump, allowing the height of the air gap (9) to be adjusted. Independent claims are included for: (A) a method for adjusting the height of the air gap; and (B) use of the air bearing as a mounting for a specimen whose surface topography is to be determined.