| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow sensor with stabilized flow rate detection accuracy by improving working accuracy of a cross section of a sensor flow path. <P>SOLUTION: The flow sensor 11 is structured by joining a sensor chip 12 having a flow rate detecting part 23 formed on an upper surface of a substrate 21 with a flow path forming member 15 provided on the sensor chip and having a flow path of a fluid flowing in the flow rate detecting part formed. The flow path forming member is formed by joining a first transparent flow path forming member 14 with a second flow path forming member 15. The first flow path forming member has a plate-like shape. The first member is equipped with an inlet hole 14c and an outlet hole 14d for the fluid to be measured. The second flow path forming member has a plate-like shape. The second member is equipped with a through port 15c forming a flow path along the flow of the fluid flowing along the flow rate detecting part. The inlet hole and the outlet hole are connected with both ends of the through port, and the flow rate detecting part is located between parts of the through port corresponding to the inlet hole and the outlet hole, thereby forming a flow path with a predetermined cross section. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
