| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an analysis apparatus capable of preventing analysis sensitivity from lowering by different sensitivity of a detection element caused from different wavelengths or incident angles of electromagnetic waves and analyzing a specimen high-sensitively. <P>SOLUTION: The analysis apparatus includes a wavelength dispersion section 104, a detection element array 105, and a spectrum calculation section 106. The wavelength dispersion section 104 disperses electromagnetic waves 101 from the specimen 103 to different wavelength components. The detection element array 105 has a plurality of detection elements for detecting electromagnetic waves dispersed to the different wavelength components by the wavelength dispersion section. The spectrum calculation section 106 calculates an spectrum from an intensity signal of the electromagnetic wave detected by the detection element. The detection element array 105 has configurations with different sensitivities for detecting electromagnetic waves for each wavelength components dispersed by the wavelength dispersion section. The wavelength dispersion section and the detection element array are arranged so that electromagnetic waves dispersed to different wavelength components by the wavelength dispersion section have different angles incident on every detection elements. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
