| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To form a channel without a corner part and having good bubble removing property while maintaining the desired dimensional accuracy when forming the channel. <P>SOLUTION: The manufacturing method of the channel substrate for the liquid discharging head includes at least the steps of: forming a shape of a liquid channel with soluble resin on the substrate; forming a liquid repelling film on the substrate and the shape of the liquid channel formed of the soluble resin; rounding a corner part of the shape of the liquid channel formed with the soluble resin not in contact with the substrate by a heat treatment; removing the liquid repelling film after the heat treatment; forming a coating resin layer on the substrate and the shape of the liquid channel formed with the soluble resin with the liquid repelling film removed; patterning the coating resin layer; and dissolving the soluble resin layer. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
