摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method which perform highly precise inspection to an electro-optical device, and to provide a manufacturing method for an electro-optical device. SOLUTION: The inspection method for inspecting an electro-optical device whose substrate (10) has: a picture signal supply circuit (101) comprising (i) a shift register (160) sequentially transferring transfer start pulses (DX) having a pulse height defined by a high power source potential (VDDX) and a low power source potential (VSSX) to sequentially output transfer signals and (ii) another circuit for supplying the picture signal to data lines on the basis of the transfer signal; and a monitor circuit (27) simulating part of the picture signal supply circuit. The inspection method includes: a step (S30) of inputting the high power source potential (VDDX) in the monitor circuit to detect an output signal outputted from the monitor circuit as a first inspection signal (CK2); and a step (S50) of inputting the low power source potential (VSSX) in the monitor circuit to detect an output signal outputted from the monitor circuit as a second inspection signal (CK3). COPYRIGHT: (C)2009,JPO&INPIT
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