| 摘要 |
PROBLEM TO BE SOLVED: To easily adjust the position of a scanning module with respect to a casing when the scanning module including a micromirror for scanning a light beam is mounted on the casing. SOLUTION: A light beam IL for adjustment emitted from a laser light radiation apparatus 22 is radiated on the micromirror 2 in the scanning module 1 mounted on the casing 50. The beam diameter of the light beam IL for adjustment is larger than the outer diameter of the micromirror 2, and a portion of the beam passes beyond the micromirror and is made incident to a quartered photodiode of a light receiving apparatus 25. When the micromirror 2 is shifted in XY direction with respect to the center of the light beam IL for adjustment, the light quantities received by the respective light receiving regions of the quartered photodiode are different from one another, thus the XY-shift of the micrometer 2 is detected on the basis of the difference in the received light quantity on a shift detection apparatus 26 and the XY-shift is displayed on a monitor 27. An operator drives micrometers MMX1, MMX2, MMXY1 and MMY2 to adjust the XY position of the scanning module 1 on the casing 50. COPYRIGHT: (C)2009,JPO&INPIT
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