A METHOD OF FABRICATING A DENSIFIED NANOPARTICLE THIN FILM WITH A SET OF OCCLUDED PORES

摘要

A method of fabricating a densified nanoparticle thin film (12) with a set of occluded pores in a chamber is disclosed. The method includes positioning a substrate (10) in the chamber; and depositing a nanoparticle ink (11), including a set of Group 14 semiconductor particles and a solvent. The method further includes heating the nanoparticle ink to a first temperature (30-300 -C), for a first time period (Tl) of 5 to 60 minutes, wherein the solvent is substantially removed, and a porous compact with a set of pores is formed. The method also includes heating the porous compact to a second temperature (300-900 -C), for a second time period (T4-T3) of 5 to 15 minutes, and flowing a precursor gas into the chamber at a partial pressure between 13.3 Pa-6.6 kPa (0.1-50 Torr), wherein the precursor gas substantially fills the set of pores (16).