| 摘要 |
<p>A position sensor system for the substrate transfer robot adjusts the location of substrate by using the end effector and reduces the number of employed position sensors. The substrate processing apparatus comprises the substrate handling chamber, a pair of the position sensor(82) and substrate transfer robot. Each sensor comprises the light beam emitter and light beam receptor. The substrate transfer robot comprises the end effector(42) and robot actuator. The substrate has the expected position which is identical with the end effector. The edge of substrate partly blocks one light beam among position sensors. At the same time, the end effector partly blocks the light beam of the other position sensor.</p> |
