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发明名称
APPARATUS AND METHOD FOR CONDITIONING AN IMMERSION FLUID
摘要
申请公布号
EP2044488(A1)
申请公布日期
2009.04.08
申请号
EP20070836117
申请日期
2007.07.18
申请人
ENTEGRIS, INC.
发明人
PAREKH, BIPIN, S.;XIA, ANNIE;CLARKE, MICHAEL;SMITH, JOSEPH, E.
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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