| 摘要 |
<p>The invention is a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member like a wafer (7), comprising robot means including at least one robot arm (5) encompassing a free end and a fixed end being attached to the robot means, wherein said robot is adapted to move said free end of said arm at least in one moving plane, whereby guiding means (3) adapted to and provided for precisely guiding said free end of said arm in at least said plane is provided. <IMAGE></p> |
