MICRO ACTUATOR, OPTICAL UNIT, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

A pair of support members (54A, 54B) each having a spring section in a part thereof support a mirror element (52), and a pair of drive mechanisms (66A, 66B) arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base (BS) . Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.