| 摘要 |
A silicon on insulator (SOI) device [53] and methods for fabricating such a device are provided. The device includes an MOS capacitor [52] coupled between voltage busses [100, 102] and formed in a monocrystalline semiconductor layer [30] overlying an insulator layer [32] and a semiconductor substrate [34]. The device includes at least one electrical discharge path [86, 98, 180, 178] for discharging potentially harmful charge build up on the MOS capacitor [52]. The MOS capacitor has a conductive electrode material forming a first plate [64] of the MOS capacitor and an impurity doped region [60] in the monocrystalline silicon layer [30] beneath the conductive electrode material forming a second plate. A first voltage bus [100] is coupled to the first plate [64] of the capacitor and to an electrical discharge path through a diode [177] formed in the semiconductor substrate and a second voltage bus [102] is coupled to the second plate [60] of the capacitor. |
