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发明名称
Particle-optical appliance provided with aberration-correcting means
摘要
申请公布号
EP1717840(A3)
申请公布日期
2009.04.08
申请号
EP20060112193
申请日期
2006.04.04
申请人
FEI COMPANY
发明人
HENSTRA, ALEXANDER
分类号
H01J37/153
主分类号
H01J37/153
代理机构
代理人
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