| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a protective film transfer sheet for a photomask capable of transferring a protective film to the photomask so that a part of the transferred protective film can be easily removed along with foreign matter. Ž<P>SOLUTION: The protective film transfer sheet is constituted by providing the protective film to a peelable support. The protective film has a property such that, when a part not bonded to the image surface of the photomask is generated when the protective film is transferred to the image surface of the photomask, the non-bonded part of the protective film can be partially removed from the protective film after transfer. Ž<P>COPYRIGHT: (C)2004,JPO Ž</p> |
