发明名称 LASER SCANNING APPARATUS AND LASER SCANNING MICROSCOPE
摘要 <p>A proposition of the present invention is to provide a laser scanning apparatus and a laser scanning microscope capable of securely conducting a condition setting at the time of laser scanning while suppressing a damage on a plane to be irradiated. Accordingly, a laser scanning apparatus of the present invention includes a light deflecting unit (11) disposed in a light path of laser light directed toward a plane to be scanned, user interfaces (21, 22 and 23) through which operational contents of the light deflecting unit are designated by a user, generating units (201, 201 A and 201 B) generating driving signals of the light deflecting unit in accordance with the designated operational contents, and testing units (112X, 112Y, 202, 201, 201A and 201 B) test-driving the light deflecting unit with the driving signals while keeping the laser light off and measuring the operational contents of the light deflecting unit during the driving.</p>
申请公布号 EP2045640(A1) 申请公布日期 2009.04.08
申请号 EP20070790182 申请日期 2007.06.20
申请人 NIKON CORPORATION 发明人 TSURUMUNE, ATSUSHI
分类号 G02B21/00;G02B26/10 主分类号 G02B21/00
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