发明名称 |
METHOD FOR FABRICATING AN ULTRA HYDROPHILIC TI-O-C BASED NANO FILM |
摘要 |
<p>An ultra-hydrophilic Ti—O—C based nano-film of which deposition thickness was improved and deposition uniformity was excellent was fabricated by mixing a Ti precursor and a liquid having a low boiling point and a high volatility—at a uniform ratio. The catalyst accelerates a vaporization of the Ti precursor and facilitates the Ti precursor to be injected into a reaction chamber, thereby improving plasma polymerization efficiency.</p> |
申请公布号 |
EP1831424(B1) |
申请公布日期 |
2009.04.08 |
申请号 |
EP20040808660 |
申请日期 |
2004.12.30 |
申请人 |
LG ELECTRONICS INC. |
发明人 |
JEONG, YOUNG-MAN;JUN, HYUN-WOO;JUNG, CHANG-IL |
分类号 |
C23C16/18;C23C16/30 |
主分类号 |
C23C16/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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