| 摘要 |
<p>An observation method of the specimen surface controls identically the luminance of the materials on the specimen surface and extends the gray difference between a defect region and a normal region. The wiring is formed in the specimen surface. The wiring comprises the insulating material and conductive material. The electron beam is irradiated in the specimen surface. The electronics obtaining the texture information of the specimen surface is detected. The specimen surface image is obtained with the detected electrons. The electron beam is irradiated in the specimen surface. In the specimen surface image, the luminance of the conductive material is same as that of insulating material.</p> |
