| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrapure-water making system more simplified while maintaining the water quality of ultrapure-water to be made. <P>SOLUTION: The ultrapure-water making system having no subsystem is equipped with a pretreatment part 1 into which raw water is introduced, an ultrapure-water making part 2 into which pre-treated water treated in the pretreatment part 1 is introduced, and a terminal piping part 3 for sending ultrapure-water prepared in the ultrapure-water making part to a use point and returning excessive ultrapure-water to the ultrapure-water making part. The ultrapure-water making part 2 is constituted of at least a tank 21 introduced with pre-treated water, a reverse osmosis membrane apparatus 22 treating water from the tank, a degassing apparatus 23, an electro-deionizing apparatus 24, and a filtration membrane device 25. The excess ultrapure-water returned from the terminal piping part is introduced into the tank. <P>COPYRIGHT: (C)2004,JPO |
