发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes a substrate; first and second semiconductor pillars; a first insulator; and a first wiring layer. The first and second semiconductor pillars are disposed over the substrate. The first and second semiconductor pillars may be aligned in a first direction. The first insulator may eclectically isolate the first and second semiconductor pillars from each other. The first wiring layer may continuously extend inside a first continuing groove that extends through the first and second semiconductor pillars and the first insulator. The first continuing groove extends in a first direction along which the first and second semiconductor pillars are aligned.
申请公布号 US2010308466(A1) 申请公布日期 2010.12.09
申请号 US20100791548 申请日期 2010.06.01
申请人 ELPIDA MEMORY, INC 发明人 TAKESAKO KAZUAKI
分类号 H01L23/52 主分类号 H01L23/52
代理机构 代理人
主权项
地址