| 摘要 |
A solid immersion lens holding device is constructed of a lens holder (30) and a lens cover (40). The lens holder (30) holds a solid immersion lens (20) in an unfixed and unbound state with a lower face (22) of the lens projecting downward through a downside opening (32) of the holder. The lens cover (40) is provided so as to face an upside opening (31) of the lens holder (30), has a cover lower face (42) located on a plane perpendicular to an optical axis, and comes into contact with a spherical lens upper face (21) of the solid immersion lens (20) at one point, the cover lower face (42) facing the solid immersion lens (20). Additionally, a positioning unit capable of positioning the solid immersion lens (20) with respect to an objective lens by referring to an image of the lens cover (40) observed through the objective lens is provided in the lens cover (40). Thereby, an immersion lens holding device that enables efficient execution of moving an immersion lens to a location over a specimen, and placing and positioning the immersion lens is realized. |
